Integrated Circuit Industry
| Gas name | Integrated Circuit Industry Applications |
| Nitrous oxide (N₂O) | Chemical Vapor Deposition (CVD) Oxidizer |
| Carbon dioxide (CO₂) | Supercritical cleaning, immersion lithography, and oxidation, diffusion, and chemical vapor deposition during conductor manufacturing processes; after curing (using dry ice), the materials are applied to both short- and long-distance transportation of electronic cryogenic materials and precision components. |
| Ultra-pure ammonia (NH₃) | Chemical vapor deposition, used as a passivation layer, etching mask, insulating layer, and capacitor dielectric layer, among other applications. |
| Germane GeH4 | Fabrication of bipolar transistors, particularly the fabrication of heterojunction bipolar transistors. |
| Phosphine (PH3) | Dopants, epitaxial growth, and chemical vapor deposition |
| Hydrogen (H₂) | Reduction reaction, epitaxial growth, and oxygen removal in electronic microchip manufacturing |
| Oxygen (O₂) | Oxidation process, plasma cleaning |
| Nitrogen (N₂) | Inert protective gas, post-etching cleaning |
| Argon (Ar) | Sputtering process protective gas, plasma stabilization |
Contact us
Address: Northern Area, Industrial Park, Tongnan District, Chongqing City
Phone: 86-023-44596803 86-023-4456 7706
Email: cqthqt@cqthqt.com
