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Three fluorinated nitrogen
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Product Name: three fluorinated nitrogen Nitrogen trifluoride
Alias: fluorinated nitrogen, three fluorine amine, three fluorine ammonia
Molecular formula: NF3
Nature: pure NF3 gas is a colorless odorless gas, when mixed with a certain amount of impurities gas, yellow color, and at the same time there will be musty or irritating odor. NF3 gas is nonflammable, but it can support combustion. When the temperature is above 350, three of the nitrogen fluoride is slowly decomposed, producing strong oxidizing fluorine at the time of decomposition. Therefore, it is a strong oxidant at high temperature.
Hazard categories: category 2.3 toxic gases, the maximum allowable content in the air is 29mg/m3.
Product purity: 99.99%~99.995%
The three is used as a source of nitrogen fluoride fluoride fluoride hydrogen fluoride gas high-energy chemical laser, the effective part of reaction between h2-O2 and F2 (about 25%) to release the laser radiation, the laser chemical laser HF-OF laser is the most promising. Three nitrogen fluoride is an excellent plasma etching gas in the microelectronics industry of silicon and silicon nitride etching with three nitrogen trifluoride has a higher etching rate and selectivity than the mixed gas of four carbon fluoride and four fluorinated carbon and oxygen, and no pollution to the surface, especially in etching integrated circuit material thickness is less than 1.5um in the three nitrogen trifluoride has very excellent etching rate and selectivity in the etched surface without leaving any residue, cleaning agent is also very good. With the development of nanotechnology and large-scale development of electronic industry, its demand will increase day by day.
Matters needing attention：
In case of NF3 gas leakage, the staff should immediately evacuate the contaminated area and take measures to prevent further leakage of NF3 gas. If any staff member is poisoned, he should be taken to hospital immediately. The leak scene should be dealt with as soon as possible, and the personnel who have leaked the scene must wear the necessary gas masks, preferably self contained positive pressure breathing apparatus. The leak site can be admitted to the staff without any harmful gas. The leak container must be carefully checked, repaired or properly handled before it can be used again. NF3 cylinders should be stored in a cool and ventilated warehouse, and the warehouse temperature shall not exceed 30 degrees. NF3 cylinders shall be kept away from fire, heat sources, and prevent direct sunlight from being stored separately from reducing agents, flammable or combustible materials. NF3 cylinders should be light and light unloaded during handling to prevent damage to cylinders and fittings. NF3 cylinders are transported by dangerous goods. When transporting, fix the NF3 cylinder with a gas bottle holder, transport it by car, road or ship container.
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